在SEM或者FE-SEM研究领域,有时对导电膜层要求非常高,这时常规的金、铂等金属已经不能满足要求,相对而言金属锇的颗粒更小,膜层细腻平坦,即使几个纳米厚度的膜,膜层也会获得非常好的导电性。我们推出的OPC锇膜镀膜仪是一款划时代的镀膜仪器。
不同与常规的离子溅射和蒸镀的膜层加工,OPC锇膜镀膜仪采用了全新的四氧化锇气体压缩方式获得锇膜,质量更好,效率更高。不论是离子溅射还是蒸镀,当高倍观察时,膜层粒子本身的粒度过大带来的问题是不可避免的。而OPC锇膜镀膜仪很好的解决了这个问题。现在推荐两款锇膜镀膜仪,60A和80T,其中, 60A仅供扫描电镜制膜用
仪器参数:
型号 |
OPC-80T |
OPC-60A |
腔室 |
Hard glass chamber: 160mm(OD)x105mm(H) |
Hard glass chamber: 120mm(OD)x73mm(H) |
膜厚 |
a few - few dozen nm
|
a few - few dozen nm
|
样品台 |
Two holes for 10mm dia SEM holder, Two holes for 15mm dia SEM holder, and one hole for 32mm dia SEM holder |
Seven holes for 10mm dia SEM holder, Four holes for 15mm dia SEM holder, or One hole for 32mm dia SEM holder |
镀膜种类 |
Osmium(OsO4) |
Osmium |
锇储存 |
Detachable, sealing up, has view port, is able to be stored in a freezer
|
Detachable, sealing up, has view port, is able to be stored in a freezer
|
|
Detachable, has view port |
|
气体输入 |
OsO4 ampoule is split in an OsO4 reservoir and its sublimated gas is introduced into gas reactor chamber. |
OsO4 ampoule is split in an OsO4 reservoir and its subkimated gas is introduced into gas reactor chamber. |
电源 |
AC100V 2A 200W(50/60Hz) |
AC100V 2A 200W(50/60Hz) |
尺寸 |
450(w)x410(D)x390(H)mm |
450(w)x350(D)x330(H)mm |
重量 |
Approx. 30kg |
Approx. 20kg |
订购信息
货号 |
产品描述 |
规格 |
OPC-60A |
锇膜镀膜仪Osmium Plasma Coater |
台 |
OPC-80T |
锇膜镀膜仪Osmium Plasma Coater |
台 |