通过认证 
新一代镀膜仪-EMS150R 型镀膜仪（真空镀膜仪/喷碳仪/蒸镀仪）采用最新技术研制而成，彩色触摸液晶屏，快速的参数输入，数种碳丝匹配，友好的用户界面，带给你不一般的操作感受！
提供3个版本的仪器：
l EMS150R S-喷金仪/离子溅射仪（适用于真空喷镀非氧化型金属，如金，铂，钯等）
l EMS150R E-喷碳仪/碳蒸镀仪（适用于真空喷镀碳膜，特别适用于SEM，用碳丝或碳绳）
l EMS150R ES-真空镀膜仪（离子溅射仪和碳蒸镀仪的结合体）
EMS150R是一款多功能紧凑型机械泵抽真空镀膜系统，对于SEM样品制备及其它镀膜应用非常理想。直径为165mm的腔室可容纳多种需要镀膜的样品，在SEM应用中提高成像质量。
EMS150R ES这个双重用途、结构紧凑、机械泵抽真空的镀膜系统可提供无与伦比的多用途镀膜,其标配有溅射插入头和碳丝蒸发插入头。快速、易更换的镀膜插入头，能在同一个紧凑设计中实现金属溅射、碳蒸镀和辉光放电三者之间的快速转换。注意，辉光放电选项限EMS150R S和EMS150R ES可用，它可实现样品表面改性（如疏水表面改为亲水表面）。
采用全自动触摸屏控制,可快速输入数据。自动放气控制功能确保了溅射期间最佳的真空状态，可提供良好的一致性和可重复性。
智能识别系统可自动探测安装了何种类型的镀膜插入头，立即运行相应的镀膜方案。可存储多个用户自定义的镀膜方案，这对于需更改镀膜参数实现不同应用的多用户实验室非常理想。多种样品台组件适用于各种尺寸和类型的样品；所有样品台都具有快速、易更换及落入式设计的特点。
可预编程的镀膜参数及方案确保结果一致，具有可重复性。设计先进的碳蒸镀插入头操作简单,具有对蒸发电流参数的完全控制，确保了SEM应用中一致的和可重复的碳沉积。可选的膜厚监控附件用于可重复的膜厚控制。
溅射、碳蒸镀、辉光放电插入头及多种可选件，使EMS150R对于多用户实验室应用非常理想。可溅射一系列非氧化性金属，如金、银、铂和钯等等。碳丝蒸镀插入头处理样品速度非常快。也可选用碳棒蒸发。还可应用于金属薄膜研究及电极的应用。
溅射靶材或碳蒸发源的选用：
l 金：常规SEM应用时使用最普遍的靶材；溅射速度快且导电效果最好。
l 银 ：高导电性且具有高的二次电子发射率。溅射上去的银易于去除，可使样品成像后还原到其原来状态。
l 铂 ：在机械泵抽真空的溅射镀膜系统中它的颗粒尺寸最小，且具有优良的二次电子发射能力。
l 钯：用于x射线能谱分析非常理想，因其谱线分布冲突相对较低。
l 金/钯合金（80:20%）：通过限制沉积期间金颗粒的团聚，钯可提高最终分辨率。
l 碳丝蒸镀：碳丝蒸镀过程的闪蒸特性及快速更换碳丝的能力，使其处理样品速度非常快。
l 碳棒蒸发：用于需要减慢速度但可控性更好的蒸发过程，可制备更趋向无定形的碳膜。
EMS150R S：
|
货号 |
产品名称 |
规格 |
|
4500 |
EMS150R S Rotary pumped sputter coater, includes an 57mm Ø x 0.1mm gold target |
1 |
|
4501 |
Quick-release sputter insert for EMS150R S and EMS150R ES – suitable for non-oxidising (noble) metals. Supplied with A 57mm Ø x 0.1mm thick gold target as standard. For additional noble metal targets (eg Platinum, Gold / Palladium, Silver) see Sputtering Targets section |
1 |
|
4502 |
Rotation stage, 50mm Ø with adjustable height for target to sample distances of 38mm-79mm (supplied with 2 mounting pillars). Note: this stage does not tilt – for tilting stage see Specimen Stages section |
1 |
EMS150R E：
|
货号 |
产品名称 |
规格 |
|
4503 |
EMS150R E Rotary pumped carbon fibre evaporator, supplied with carbon fibre / cord |
1 |
|
4504 |
Quick-release carbon fibre evaporation insert for EMS150R E and EMS150R ES – suitable for evaporation of carbon fibre and carbon cord |
1 |
|
4506 |
Rotation stage, 50mm Ø with adjustable height for target to sample distances of 38mm-79mm (supplied with 2 mounting pillars). Note: this stage does not tilt – for tilting stage see Specimen Stages section |
1 |
EMS150R ES：
|
货号 |
产品名称 |
规格 |
|
4507 |
EMS150R ES Rotary pumped sputter coater, includes an 57mm Ø x 0.1mm gold target, and carbon fibre evaporator, supplied with carbon fibre / cord |
Each |
|
4508 |
Quick-release sputter insert for EMS150R S and EMS150R ES – suitable for non-oxidising (noble) metals. Supplied 57mm Ø x 0.1mm thick gold target as standard. For additional noble metal targets (eg Platinum, Gold / Palladium, Silver) see Sputtering Targets section |
Each |
|
4509 |
Quick-release carbon fibre evaporation insert for EMS150R E and EMS150R ES – suitable for evaporation of carbon fibre and carbon cord |
Each |
|
4510 |
Rotation stage, 50mm Ø with adjustable height for target to sample distances of 38mm-79mm (supplied with 2 mounting pillars). Note: this stage does not tilt – for tilting stage see Specimen Stages section |
Each |
可选配件：
|
货号 |
产品名称 |
规格 |
|
4511 |
Additional sputter insert for quick metal change (R S and R ES only). Note: this is an entire sputtering assembly; individual noble metal targets can also be purchased |
Each |
|
4512 |
Carbon rod evaporation insert for 3.05mm Ø rods (R E and R ES only). Includes manual rod shaper and 3.05mm Ø carbon rod |
Each |
|
4513 |
Glow discharge insert to modify surface properties (eg hydrophobic to hydrophilic conversion) or to clean surface residues (R S and R ES only). Can be retrofitted |
Each |
|
4515 |
Extended height vacuum chamber (214mm high – the standard chamber is 127mm high). For increased source to sample distance and for coating large specimens |
Each |
|
4516 |
Rotating vacuum spigot allows more convenient connection of the vacuum hose to the rear of the ems150R when bench depth is limited |
Each |
|
4517 |
Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This „modification‟ is used to measure and control the thickness of material deposited |
Each |
|
4518 |
Spare quartz crystal |
Each |
备选样品台Specimen stages
|
货号 |
产品名称 |
规格 |
|
4519 |
50mm Ø rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37mm-60mm). Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm |
Each |
|
4520 |
90mm Ø rotating specimen stage for glass microscope slides (up to two x 75mm x 25mm slides). Stage rotation speed variable between 8 and 20rpm |
Each |
|
4521 |
Variable angle “Rotacota” rotary planetary stage with 50mm Ø specimen platform. Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm |
Each |
|
4522 |
Flat rotation specimen stage for 100mm / 4” wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm |
Each |
靶材系列：
|
货号 |
产品名称 |
规格 |
|
4538 |
Carbon fibre cord - high purity - 1m |
|
|
4539 |
Carbon fibre cord - high purity - 5m |
|
|
4540 |
Carbon fibre cord - standard grade - 1m |
|
|
4541 |
Carbon fibre cord - standard grade - 10m |
|
|
4542 |
Carbon fibre cord - standard grade - 100m |
|
|
4543 |
Carbon rods - 3.05mm Ø x 50mm length (shaped) pack of 10 |
|
|
4544 |
Carbon rods 3.05mm Ø x 300mm length (unshaped) pack of 10) |
|
|
4546 |
Manual rod shaper for 3.05mm Ø carbon rods |
|
|
4523 |
57mm Ø x 0.1mm Gold |
1 |
|
4524 |
57mm Ø x 0.2mm Gold |
1 |
|
4525 |
57mm Ø x 0.3mm Gold |
1 |
|
4526 |
57mm Ø x 0.1mm Gold/Palladium (80/20%) |
1 |
|
4527 |
57mm Ø x 0.2mm Gold/Palladium (80/20%) |
1 |
|
4528 |
57mm Ø x 0.3mm Gold/Palladium (80/20%) |
1 |
|
4529 |
57mm Ø x 0.1mm Platinum |
1 |
|
4530 |
57mm Ø x 0.2mm Platinum |
1 |
|
4561 |
57mm Ø x 0.3mm Platinum |
1 |
|
4532 |
57mm Ø x 0.1mm Nickel |
1 |
|
4533 |
57mm Ø x 0.1mm Silver |
1 |
|
4534 |
57mm Ø x 0.1mm Palladium |
1 |
|
4535 |
57mm Ø x 0.1mm Copper |
1 |
|
4536 |
57mm Ø x 0.1mm Platinum/Palladium (80/20%) |
1 |
|
4537 |
57mm Ø x 0.3mm Platinum/Palladium (80/20%) |
1 |
备注：EMS 450型镀碳仪（真空镀膜仪/喷碳仪/蒸镀仪）已经不再供货！
